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Product Brief：
Sapphire/SIC wafer flatness and surface appearance system provide a previous surface flatness testing solution, though non-contract lighting testing to record the whole information of the surface, rapid and fast measurement for various of surfaces, line and all kinds of surface information.
 
Product Feature:
■  Non contract and non damage testing.
■  For all kinds of material: semiconductor, metal, glasses…..
■  For all kinds of wafers: Sapphire, Sic, GaAs,SiO2,Ge, LiNbO3
■  For all kinds of surfaces: Abrasive surface, Polished, Ultra-smooth surface
■  can test several informations:Thickness,TTV,SORI,LTV,LDOF,Pressure,BOW,Curve,Flatness,
planeness,line Contours,surface contours
■  Wholly analyze system,for all kinds of surface.
■  Automatic,Rapid,accuracy and stable.
■  Over 15 years for industry and over hundreds application.
 






Technical Information:
■  Accuracy: 50nm （2.0μ″）
■  Repeatable: 15 nm（0.6μ″）（1 sigma）
■  Resolution: 5nm （0.2μ″）
■  Sample size: 25mm-200mm
■  Number of testing points: 230,000 / measurement
■  Testing time: 5s
■  Power supply: ～220V  50Hz   
  



Customer:
Honeywell Electronic Materials，SEI，Showa Denko，SESMI，Saint Gobain，Nikko Materials，Hitachi Cable，Freiberger Compound Materials，Crystal Tech，Samsung，LG，Crystalwise，Wafer Works……